MULTICOLOR LIGHT EMITTING MICRO LED DISPLAY AND METHOD OF FABRICATION THEREOF

Smart overview of the Invention

The patent application details a method for fabricating multicolor light-emitting micro LED displays. The process involves creating semiconductor light-emitting structures that emit different colors, such as blue, green, and red, on a single growth substrate through selective area growth. These structures form individual subpixels within a multicolor pixel array, which can be transferred to a backplane in a single step, resulting in a high-resolution display.

Field and Background

This innovation pertains to light-emitting devices, specifically displays that incorporate multicolor light-emitting device subpixels from a common growth substrate. Light-emitting devices like LEDs are common in electronic displays, such as those used in laptops and televisions. The technology focuses on improving the efficiency and integration of these devices in multicolor displays.

Technical Summary

The display comprises a backplane with a planar mounting surface to which a multicolor pixel is bonded. Each pixel consists of subpixels that emit light at different peak wavelengths. These subpixels have a front side for light emission and a rear side facing the backplane. The fabrication method includes forming semiconductor material layers and dielectric layers, patterning them to create openings, and using selective growth to form light-emitting structures with distinct peak wavelengths.

Fabrication Methodology

The method involves the sequential formation of semiconductor material layers and dielectric layers on an initial growth substrate. Lithographic patterning and etching processes are used to create pedestal structures. Light-emitting device structures are grown selectively from these pedestals, each designed to emit a specific color. The process allows for the creation of multicolor pixels with subpixels tailored for different emission wavelengths and efficiencies.

Display Assembly

The multicolor pixel array is transferred from the initial growth substrate to a target substrate, such as a backplane. This backplane supports the alignment and electrical connection of the subpixels, enabling the display to show a wide range of colors. The arrangement allows for precise control over the color output of each pixel, making it suitable for high-resolution displays. The methodology supports direct view displays with subpixels that emit red, green, and blue light, driven by a backplane circuit.